MEMS/MST Equipment

M.E.L. introduces R.D. McFawes

Research & Development Multi Channel Fully Automated Wet Etching System

Main Features:

• automated development of MEMS & porous silicon etching processes
• onboard neutralisation of HF
• complete user protection against etchants & solvents
• flexible software
• permanent monitoring of process parameters
• simple transfer to serial production
• reduced etchant & solvent consumption
• small footprint