UHV LEAK VALVE

The new cutting edge of leak valve applications

1. easy to operate
2. UHV version, free of gaps, dead volume just 1,7 ccm (totally)
3. easy to maintain and to service
4. bakeable up to 450°C
5. for applications needing temperatures more than 300°C during operation
6. if required, operation temperature fixable above ambient temperature
7. low maintainance costs: no sapphire, quick replace of diaphragm
8. high reproducibility, due to directdrive
9. leak range: 10+0 to 10-8 mbar.l/s, in case of room temperatures
10. leak range: 10+0 to 10-10 mbar.l/s, in case of >250°C
11. infinitely variable
12. small hysteresis, due to direct motion of the sealing drive
13. Baking jacket available (option)
14. easy to motorize
15. motorized version: computer contollable
16. few spare parts